Gas Plasma Dry Cleaners

AED 238,731.00

Availability:In stock

Only %1 left

Yamato PDC200/210/510 Parallel Plate Plasma Surface Treatment System – compact, high-performance tabletop plasma processor for semiconductor, electronics, and bio applications. RIE/DP plasma modes, embedded electrode for uniform plasma, LCD touch panel control, and observation window with emergency stop. Handles CSP/BGA substrates, organic film removal, and polymer surface modification.

BrandYamato Scientific

More Information
Product Name	Gas Plasma Dry Cleaners
Weight	1.000000

Skip to the end of the images gallery

Skip to the beginning of the images gallery

Details

Technical Data
Specification	PDC200	PDC210	PDC510
Plasma mode	RIE (DP optional)	RIE/DP switchable	RIE/DP switchable
Electrode structure	Parallel plate (embedded electrode structure)
High-frequency output	MAX 300W	MAX 300W	MAX 500W
Oscillation frequency	13.56MHz crystal oscillation
Control/display	LCD touch panel
Chamber dimensions (W×D×H)	400×250×150mm	400×250×150mm	500×290×200mm
Stage dimensions (W×D)	250×170mm	250×170mm	410×210mm
Chamber material	Aluminum
Reaction gas (purge gas)	2 systems: Argon, Oxygen, etc. (Nitrogen or dry air)
Reaction gas flow control	Flow meter	Flow meter	Mass flow controller
Vacuum pump	Separate (not included)	Rotary vacuum pump (~345 L/min)	Rotary vacuum pump (~500 L/min)
External dims (W×D×H)	540×600×600mm	540×600×600mm	700×700×1280mm
Power source	Single-phase AC100V, 50/60Hz, 15A	Single-phase AC100V, 50/60Hz, 15A	3-phase AC200V, 50/60Hz, 15A

More from Yamato Scientific

Large Low-temperature constant-temperature
Variants from AED 14,330.00

AED 14,330.00
SKU: Large Low-temperature constant-temperature
Low-temperature constant temperature chamber
Variants from AED 17,638.00

AED 17,638.00
SKU: Low-temperature constant temperature chamber
Immersion type constant temperature device Thermomate
Variants from AED 5,306.00

AED 5,306.00
SKU: Immersion type constant temperature device Thermomate
Low-temperature constant-temperature incubator
Variants from AED 12,608.00

AED 12,608.00
SKU: Low-temperature constant-temperature incubator
Economy Constant Temperature Water Baths
Variants from AED 2,308.00

AED 2,308.00
SKU: Economy Constant Temperature Water Baths
Shaking Incubator Agitating Water Baths, Reciprocating
Variants from AED 11,645.00

AED 11,645.00
SKU: Shaking Incubator Agitating Water Baths, Reciprocating
Low-temperature constant-temperature
Variants from AED 16,052.00

AED 16,052.00
SKU: Low-temperature constant-temperature