Gas Plasma Dry Cleaners

AED 238,731.00

Availability:In stock

Only %1 left

Yamato PDC200/210/510 Parallel Plate Plasma Surface Treatment System – compact, high-performance tabletop plasma processor for semiconductor, electronics, and bio applications. RIE/DP plasma modes, embedded electrode for uniform plasma, LCD touch panel control, and observation window with emergency stop. Handles CSP/BGA substrates, organic film removal, and polymer surface modification.

BrandYamato Scientific

More Information
Product Name	Gas Plasma Dry Cleaners
Weight	1.000000

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Details

Technical Data
Specification	PDC200	PDC210	PDC510
Plasma mode	RIE (DP optional)	RIE/DP switchable	RIE/DP switchable
Electrode structure	Parallel plate (embedded electrode structure)
High-frequency output	MAX 300W	MAX 300W	MAX 500W
Oscillation frequency	13.56MHz crystal oscillation
Control/display	LCD touch panel
Chamber dimensions (W×D×H)	400×250×150mm	400×250×150mm	500×290×200mm
Stage dimensions (W×D)	250×170mm	250×170mm	410×210mm
Chamber material	Aluminum
Reaction gas (purge gas)	2 systems: Argon, Oxygen, etc. (Nitrogen or dry air)
Reaction gas flow control	Flow meter	Flow meter	Mass flow controller
Vacuum pump	Separate (not included)	Rotary vacuum pump (~345 L/min)	Rotary vacuum pump (~500 L/min)
External dims (W×D×H)	540×600×600mm	540×600×600mm	700×700×1280mm
Power source	Single-phase AC100V, 50/60Hz, 15A	Single-phase AC100V, 50/60Hz, 15A	3-phase AC200V, 50/60Hz, 15A

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