Plasma Cleaner

AED 354,824.00

Availability:In stock

SKU

LBX-YMT-0559

The PDC610 Plasma Cleaner delivers high-power plasma processing with 600W output and selectable RIE/DP modes. Featuring a 3-segment independent parallel plate electrode design, PLC touchscreen control, and a compact footprint, it ensures precise and efficient surface treatment. Ideal for semiconductor, laboratory, and industrial applications requiring reliable plasma cleaning and ashing.

BrandYamato Scientific

More Information
Product Name	Plasma Cleaner
Weight	1.000000
Part No.	LBX-YMT-0559
Supplier Item Code	PDC610

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Details

Technical Data
Specification	PDC610
Plasma Mode	RIE / DP (Fixed Mode)
Electrode Configuration	3-segment independent parallel plate (fixed)
RF Output	Max 600W
Frequency	13.56 MHz
Control · Display	PLC · Touchscreen
Reaction Chamber Dimensions	W350 × D270 × H300 mm
Reaction Chamber Material	A5052 (Aluminum Alloy)
Process Gases	2 systems (Ar, O₂)
Fill Gas	N₂ or Dry Air
Vacuum Pump	Oil pump (approx. 345 L/min) · Standard
External Dimensions	W600 × D722 × H700 mm
Exterior Material	Stainless steel
Power Supply	3-phase AC200V, 50/60Hz, 15A