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Plasma Cleaner
AED 354,824.00
Availability:In stock
SKU
LBX-YMT-0559
The PDC610 Plasma Cleaner delivers high-power plasma processing with 600W output and selectable RIE/DP modes. Featuring a 3-segment independent parallel plate electrode design, PLC touchscreen control, and a compact footprint, it ensures precise and efficient surface treatment. Ideal for semiconductor, laboratory, and industrial applications requiring reliable plasma cleaning and ashing.
BrandYamato Scientific
| Product Name | Plasma Cleaner |
|---|---|
| Weight | 1.000000 |
| Part No. | LBX-YMT-0559 |
| Supplier Item Code | PDC610 |
| Technical Data | |
|---|---|
| Specification | PDC610 |
| Plasma Mode | RIE / DP (Fixed Mode) |
| Electrode Configuration | 3-segment independent parallel plate (fixed) |
| RF Output | Max 600W |
| Frequency | 13.56 MHz |
| Control · Display | PLC · Touchscreen |
| Reaction Chamber Dimensions | W350 × D270 × H300 mm |
| Reaction Chamber Material | A5052 (Aluminum Alloy) |
| Process Gases | 2 systems (Ar, O₂) |
| Fill Gas | N₂ or Dry Air |
| Vacuum Pump | Oil pump (approx. 345 L/min) · Standard |
| External Dimensions | W600 × D722 × H700 mm |
| Exterior Material | Stainless steel |
| Power Supply | 3-phase AC200V, 50/60Hz, 15A |
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