Plasma reactor (PR500 (flow meter specification))

AED 213,584.00

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Yamato Barrel-Type Plasma Reactor – compact low-temperature plasma system for photoresist removal, surface activation, and micropolishing. Large-diameter φ215mm quartz chamber, 500W output at 13.56MHz with auto-tuning. PR500 uses manual flow meter control; PR510 adds mass flow meter and automatic touch panel sequence operation for improved precision.

BrandYamato Scientific

More Information
Product Name	Plasma reactor (PR500 (flow meter specification))
Weight	1.000000

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Details

Technical Data
Specification	PR500 (Flow Meter) / PR510 (Mass Flow Meter)
Product Code	215007 / 215012
System	DP Method, Barrel-Type
High Frequency Output	Maximum 500W
Oscillation Frequency	13.56MHz
Tuning Method	Auto-Tuning
Reaction Chamber	Quartz, φ215 × 305mm
Reaction Gas Systems	2 Systems (O₂ / CF₄)
Control System	PR500: Manual PR510: Automatic Sequence via Touch Panel
Flow Control	PR500: Flow Meter PR510: Mass Flow Meter
Piping Material	Stainless Steel (SUS), Teflon
External Dimensions (W × D × H)	438 × 520 × 760mm
Weight	Approximately 60kg
Power Supply (50/60Hz)	PR500: AC100V, 9A (15A Breaker) PR510: AC200V, 3-Phase, 8A (15A Breaker)